5 results
Effect of Laser Thermal Processing on Defect Evolution in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 717 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, C1.9
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- 2002
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Nonmelt Laser Annealing of 1 Kev Boron Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J4.1
- Print publication:
- 2001
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Defect Reduction in Laser Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B10.3
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- 2000
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Laser-Assisted TiSi2 Formation for ULSI Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 265
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- 1997
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Shallow Junction Formation in Silicon: Dopant Incorporation and Diffusion Through Tungsten Silicide Films Using Gas Immersion Laser Doping (Gild)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 673
- Print publication:
- 1992
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